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A grinder designed to provide an automatic grinding operation for the manufacture of a semiconductor device wafer. The grinder includes a base, a rotatable index ...
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Grinding of silicon wafers: a review from historical perspectives . ... Later, another type of singleside grinding machine (called an infeed wafer grinder or wafer
The majority of semiconductor devices are built on silicon wafers. Manufacturing of highquality silicon wafers involves several machining processes including grinding.
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Fine grinding of silicon wafers: effects of chuck shape on grinding marks ... International Journal of Machine Tools ... The wafer grinding process is illustrated in ...
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Figure 1. a) A backgrinding process leaves a characteristic scratch pattern on the back of the wafer. b) The back of the die from certain locations on the wafer have ...
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